首頁 > Equipment Assembly Test
Equipment Assembly Test
Sputter vacuum control emulator
Specification table
| ◆ | 4 chambers can load 8 end- blocks. |
| ◆ |
Supporting equipments:dry pump×1, tubro pump×4, Polycold cryochiller×1 |
| ◆ |
DC Power : i-power (ADL) MF Power : i-pulse RF Power : RF 5500 (AE) |
| ◆ |
Practical application Different types of metal and ceramic targets (ex. SiO2, TiO2, Nb2O5, and ITO, etc.) can be loaded depends on experimental requirements with various factors set as power and pressure, to complete sample tests, and the final even state of coating film can be observed also. |
Spectrophotometer
(SHIMADZU UV- 1900)
| ◆ | Photometric：To analyze photometry in single or multiple wavelength. |
| ◆ | Spectrum：Full- spectrum scanning. |
| ◆ | Time Course：To measure the absorbency in fixed wavelength due to time change. |
Helium leak detector
| ◆ | To use helium to detect the operating state of end- block in vacuum environment. |
