首頁 > Service

Service | Product Testing (Sputter Cathode and End Block)

Product Testing (Sputter Cathode and End Block)

Sputter Vacuum Control Emulator

Specification Table
4 chambers
Supporting equipments:
Dry Pump x2,
Roots Pump x1,
Turbo Pumpx4,
Polycold x1
DC Power : i-power (ADL)
MF Power : i-pulse
RF Power : RF 5500 (AE)
Practical application
Different types of metal and ceramic targets
(ex. SiO2, TiO2, Nb2O5, and ITO, etc.) can be loaded
depends on experimental requirements with various
factors set as power and pressure, to complete sample
tests, and the final even state of coating film can
be observed also.

Spectrophotometer
(SHIMADZU UV- 1900)

Photometric:To analyze photometry in single or multiple wavelength.
Spectrum:Full- spectrum scanning.
Time Course:To measure the absorbency in fixed wavelength due to time change.

Helium Leak Detector

Test operating state
of end- block or cathode in vacuum environment.

Ellipsometer

Measure the thickness of films such as SiO2、Poly silicon、SiN…etc

Multidimensional Magnetic Field Test System

This system is the most advanced testing system in the world in high-precision testing of three-dimensional magnetic field in the field of motor, angle magnetic field analysis, and three-dimensional imaging of overall three-dimensional magnetic field distribution. It can test the overall three-dimensional magnetic field distribution of stator and rotor of permanent magnet motor, AC motor, micro motor, etc., and test the three-dimensional magnetic field values at different points at different angle.
PAGE TOP